Hsiuping University of Science and Technology Institutional Repository : Item 310993100/1367

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HUSTIR > College of Engineering > Department of Electronic Engineering > Journal > Item 310993100/1367

Please use this identifier to cite or link to this item: http://ir.hust.edu.tw/dspace/handle/310993100/1367

Title:	An optimal quasi-superlattice design to further improve thermal stability of tantalum nitride diffusion barriers
Authors:	G. S. Chen;S. C. Huang;S. T. Chen;T. J. Yang;P. Y. Lee;J. H. Jou;T. C. Lin
Date:	2000
Issue Date:	2009-02-03T07:00:32Z
Relation:	Applied Physics Letters, 76, pp. 2895?2897. (SCI)
Appears in Collections:	[Department of Electronic Engineering] Journal

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