Hsiuping University of Science and Technology Institutional Repository : Item 310993100/3634

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HUSTIR > College of Engineering > Department of Electrical Engineering & Graduate Institute > Patents > Item 310993100/3634

Please use this identifier to cite or link to this item: http://ir.hust.edu.tw/dspace/handle/310993100/3634

Title:	立型連續式濺鍍設備之基板傳輸裝置
Authors:	許耿禎;陳恒輝;呂奇璜
Contributors:	修平技術學院
Date:	2007-11-14
Issue Date:	2013-08-26T07:24:39Z
Abstract:	一種立型連續式濺鍍設備之基板傳輸裝置，基板係由載具所搭載，且在真空腔體下方設置傳輸動力單元，載具的底端係與傳輸動力單元接觸，用以傳輸垂直式擺置之基板，在相對於基板的兩側的腔體內側面相對應位置，各分別設置至少一磁性元件，且相對應的磁性元件之磁性大小相同，由於載具本身為金屬材質或設置有磁柱，故可藉由相對應磁性元件對載具所產生的非接觸式磁力穩定作用，避免基板因重心不穩傾倒而導致基板表面碰撞或刮傷，以取代傳統接觸式輔助裝置，本裝置亦可同時應用至單片基板雙面鍍膜或雙片基板單面鍍膜。
Appears in Collections:	[Department of Electrical Engineering & Graduate Institute] Patents

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