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Title: 製作鐵酸鉍参鋁箔膜於ITO基板上之特性研究
Authors: 盧仕勛;蔡丞冠;吳宇軒;施凱棠
Contributors: 電子工程系
Keywords: 製作鐵酸鉍参鋁箔膜於ITO基板上之特性研究
Date: 2022-06
Issue Date: 2022-12-05T02:13:49Z
Abstract: 本研究是利用溶膠-凝膠法,鐵酸鉍摻鋁元素(BiFeO3)薄膜,製作在透明玻璃片(ITO)基板上,鋁的摻量X為0%、2%、4%、6%、8%,並使用快速熱退火熱處理溫度為600度,量測BiFe1-xAlxO3 (x=0、0.02、0.04、0.06、0.08)薄膜的微結構、鐵電性特性,後續要再用RTA燒結600度,探討BiFe1-xAlxO3薄膜在ITO基板上成長的特性。
Appears in Collections:[Department of Electronic Engineering] Monograph

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