Hsiuping University of Science and Technology Institutional Repository : Item 310993100/7612

English | 正體中文 | 简体中文 | Items with full text/Total items : 4343/7642
Visitors : 3706743 Online Users : 482

RC Version 3.2 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.

Scope Adv. Search

Login ‧ Upload ‧ Help ‧ About ‧ Administer

HUSTIR > College of Engineering > Department of Electronic Engineering > Monograph > Item 310993100/7612

Please use this identifier to cite or link to this item: http://ir.hust.edu.tw/dspace/handle/310993100/7612

Title:	氧化鋅摻鋁薄膜特性之研究
Authors:	簡賜賓李宜峰李泓頡王永昶
Contributors:	電子工程系
Keywords:	溶膠-凝膠法氧化鋅薄膜導電
Date:	2021-06
Issue Date:	2021-08-30T03:53:42Z
Abstract:	本研究是利用溶膠-凝膠法(Sol-gel)將氧化鋅摻雜鋁元素(Zn1-xAlxO)薄膜(簡稱AZO薄膜)製作在透明玻璃ITO基板上，鋁的摻雜量x為0、2%、4%、6%等，並使用快速熱退火熱處理溫度為600oC，透過XRD及SEM量測分析AZO薄膜之繞射峰強度與其晶相生長之關係，並使用UV光譜儀量測AZO薄膜之穿透率，使用四點探針法量測AZO之電阻率，研究結果得知AZO薄膜具備高穿透率95%及當x=4%時具有最好之(002)晶相成長及較低之電阻率為400 Ω/sq，顯示本專題使用溶膠-凝膠法及快速熱退火熱處理AZO薄膜具備透明導電膜之應用。
Appears in Collections:	[Department of Electronic Engineering] Monograph

Files in This Item:

There are no files associated with this item.