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Items for Author "S. T. Chen"

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Collection	Date	Title	Authors
[電子工程系] 期刊論文	2006	Electroless Deposition of Ultrathin Co-B Based Barriers for Cu Metallization Using an Innovative Seeding Technique	G. S. Chen; Y. S. Tang; S. T. Chen; J. Yang
[電子工程系] 期刊論文	2004	Characterization of ultra-thin electroless barriers grown by a self-aligned deposition process on silicon-based dielectric films	S. T. Chen; G. S. Chen
[電子工程系] 期刊論文	2004	Self-Aligned Deposition process for ultrathin electroless barriers and copper films on low-k dielectric films	G. S. Chen; S. T. Chen; R. F. Louh; T. J. Yang; C. K. Lin
[電子工程系] 期刊論文	2003	Plasma passivation of siloxane-based low-k polymeric films: a comparison of single and mixed (O2/N2/H2) gas sources	S. T. Chen; G. S. Chen; T. J. Yang
[電子工程系] 期刊論文	2003	The synergistic effect of N2/H2 gases in the plasma passivation of siloxane-based low-k polymer films’	S. T. Chen; G. S. Chen; T. J. Yang; T. C. Chang; W. H. Yang
[電子工程系] 期刊論文	2001	Growth mechanism of sputter deposited Ta and Ta-N thin films induced by an underlying titanium layer and varying nitrogen flow rates	G. S. Chen; S. T. Chen; S. C. Huang; H. Y. Lee
[電子工程系] 期刊論文	2000	An optimal quasi-superlattice design to further improve thermal stability of tantalum nitride diffusion barriers	G. S. Chen; S. C. Huang; S. T. Chen; T. J. Yang; P. Y. Lee; J. H. Jou; T. C. Lin
[電子工程系] 期刊論文	2000	Diffusion barrier properties of single- and multilayered quasi-amorphous tantalum nitride thin films against copper penetration	G. S. Chen; S. T. Chen
[電子工程系] 期刊論文	2000	Evaluation of single- and multilayered amorphous tantalum nitride thin films as diffusion barriers in copper metallization	G. S. Chen; S. T. Chen; L. C. Yang; P. Y. Lee

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Items for Author "S. T. Chen"